Research

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ah_Hui

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does any one here know about Magnetron Gun-RF/DC Sputtering
Deposition System for a thin film?
i'm currently doing a research on it...
i've been looking on the internet for the past few days..but most of the websites contains only its basic review of the machine..
i need to find out the in-depth review of its technology, (the physical operation mechanism of the system, advantages/disadvantages) and potential research activities (sensors, metallizations, superconductors, etc)??

any one??

thanks
 
Hi, here is some info on this subject.

**broken link removed**
**broken link removed**

I hope it is useful.

Ante :roll:
 
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