does any one here know about Magnetron Gun-RF/DC Sputtering
Deposition System for a thin film?
i'm currently doing a research on it...
i've been looking on the internet for the past few days..but most of the websites contains only its basic review of the machine..
i need to find out the in-depth review of its technology, (the physical operation mechanism of the system, advantages/disadvantages) and potential research activities (sensors, metallizations, superconductors, etc)??

any one??

thanks

 

Hi, here is some info on this subject.

http://www.asahigrp.net/e/mmpc3.html
http://www.wafer-bumping.com/documen...thin_film.html

I hope it is useful.

Ante :roll: