1. Could someone help me to determine the gate oxide capacitance for a MOSFET?
2. I know the oxide thickness, what more do I need to find it out?
3. What is the equation? C= eps*area/thickness ?

 

No datasheet? Or is this part of an experiment?

 

You need to know the thickness, area and the dielectric constant of the oxide.

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1. yes it's an experiment.

2. I have the thickness: 9nm
and the area: 0.24 x 10 nm^2
and the oxide is silicon oxide with dielectric constant 3.9

So is this equation applicable also in micro scale devices?
C= ( eps* area ) / thickness

 

Of course the equation is valid at any scale, but your problem is a little more complicated because the capacitance of a MOS structure is dependent by the conductivity of semiconductor region under oxid, so is dependent by voltage applied to MOS, because this voltage will modulate the conductivity of semiconductor right away under oxide.